{"product_id":"54585","title":"Tel CS 500 Photoresist Developer","description":"Tel CS 500 Photoresist Developer\u003cbr\u003e- Track runs Gen 2 (370 mm x 470 mm) panels\u003cbr\u003e- Handle Cassettes (4) \u003cbr\u003e- Robots and Transfer Stations (3)\u003cbr\u003e- SCR \/ (4) Cool \/ (7) L Oven \/ HMDS\u003cbr\u003eGlass Substrate:\u003cbr\u003e- Min: 300 mm x 400 mm\u003cbr\u003e- Max: 400 mm x 500 mm\u003cbr\u003eModules Includes:\u003cbr\u003e- Hot Plates (7) \u003cbr\u003e- Chill Plates (4)\u003cbr\u003e- HMDS Vapor Prime\u003cbr\u003e- Megasonic Scrubber\u003cbr\u003e- Edge Bead Remover\u003cbr\u003eEquipment Specs: \u003cbr\u003e- Main Controller: NEC 98\" Series\u003cbr\u003e- Loader \/ Unloader: Uni-Cassettes (4)\u003cbr\u003e- Spin Coater Heads (4) (Coater \/ Developers (2) \/ SCR)\u003cbr\u003eCoater Specs:\u003cbr\u003e- Function for one Coater Head: Coater Cup: TEL Standard Cup\u003cbr\u003e- Photo Resist Line: Nozzles (2)\u003cbr\u003e- Back Side Rinse\u003cbr\u003e- RRC Function\u003cbr\u003eP\/R Drain:\u003cbr\u003e- Local Drain 10L Tank\u003cbr\u003e- Drain Tank with Pump\u003cbr\u003eP\/R Supply Allocation: Bottle \/ Nozzle\u003cbr\u003e- Standard Function: Cup Exhaust Flow Monitor with Interlock\u003cbr\u003eDummy Dispense Control Panel \u003cbr\u003eChemical Flow Detection with Flow Meter Sensor\u003cbr\u003eSolvent Supply:\u003cbr\u003e- Gal Canisters (5)\u003cbr\u003e- Tanks Auto Change (2) \u003cbr\u003eDEV Specs:\u003cbr\u003e- Function for Developer Unit: \u003cbr\u003e- DEV Cup: TEL Standard Cup\u003cbr\u003e- DEV Line: Nozzle for Etch Unit\u003cbr\u003e- Back Side Rinse\u003cbr\u003e- Top Rinse Function\u003cbr\u003e- EV Drain: Facility Drain\u003cbr\u003e- DEV Supply Allocation: Supply from Facility with 200 Liter Tank\u003cbr\u003e- CS500 Standard Function Cup Exhaust Flow Monitor with Interlock\u003cbr\u003e- Dummy Dispense Control Panel\u003cbr\u003eSCR Specs:\u003cbr\u003e- SCR Cup: TEL Standard Cup\u003cbr\u003e- DI Line: Nozzle for Etch Unit with Mega-Sonic\u003cbr\u003e- Back Side Rinse\u003cbr\u003e- Top Rinse Function\u003cbr\u003e- D.I. Drain: Facility Drain\u003cbr\u003e- CS500 Standard Function: Cup Exhaust Flow Monitor with Interlock\u003cbr\u003e- Dummy Dispense Control Panel\u003cbr\u003e- Chemical Flow Detection with Flow Meter Sensor\u003cbr\u003e1997 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814680457406,"sku":"54585","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/front1_5672aad7-7a4a-4dcb-a15b-fef91d857092.jpg?v=1737511753","url":"https:\/\/www.bridgetronic.com\/products\/54585","provider":"Bridge Tronic Global","version":"1.0","type":"link"}