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Tel CS 500 Photoresist Developer
Tel CS 500 Photoresist Developer
Tel CS 500 Photoresist Developer

Tel CS 500 Photoresist Developer

Asset #: 54585

Make: Tel

Model: CS 500

Tel CS 500 Photoresist Developer
- Track runs Gen 2 (370 mm x 470 mm) panels
- Handle Cassettes (4)
- Robots and Transfer Stations (3)
- SCR / (4) Cool / (7) L Oven / HMDS
Glass Substrate:
- Min: 300 mm x 400 mm
- Max: 400 mm x 500 mm
Modules Includes:
- Hot Plates (7)
- Chill Plates (4)
- HMDS Vapor Prime
- Megasonic Scrubber
- Edge Bead Remover
Equipment Specs:
- Main Controller: NEC 98" Series
- Loader / Unloader: Uni-Cassettes (4)
- Spin Coater Heads (4) (Coater / Developers (2) / SCR)
Coater Specs:
- Function for one Coater Head: Coater Cup: TEL Standard Cup
- Photo Resist Line: Nozzles (2)
- Back Side Rinse
- RRC Function
P/R Drain:
- Local Drain 10L Tank
- Drain Tank with Pump
P/R Supply Allocation: Bottle / Nozzle
- Standard Function: Cup Exhaust Flow Monitor with Interlock
Dummy Dispense Control Panel
Chemical Flow Detection with Flow Meter Sensor
Solvent Supply:
- Gal Canisters (5)
- Tanks Auto Change (2)
DEV Specs:
- Function for Developer Unit:
- DEV Cup: TEL Standard Cup
- DEV Line: Nozzle for Etch Unit
- Back Side Rinse
- Top Rinse Function
- EV Drain: Facility Drain
- DEV Supply Allocation: Supply from Facility with 200 Liter Tank
- CS500 Standard Function Cup Exhaust Flow Monitor with Interlock
- Dummy Dispense Control Panel
SCR Specs:
- SCR Cup: TEL Standard Cup
- DI Line: Nozzle for Etch Unit with Mega-Sonic
- Back Side Rinse
- Top Rinse Function
- D.I. Drain: Facility Drain
- CS500 Standard Function: Cup Exhaust Flow Monitor with Interlock
- Dummy Dispense Control Panel
- Chemical Flow Detection with Flow Meter Sensor
1997 Vintage

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