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Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher
Lam TCP 9600 CFE Metal Etcher

Lam TCP 9600 CFE Metal Etcher

Asset #: 53904

Make: Lam

Model: TCP 9600 CFE

Wafer Sizes: 6 inch

Last Confirm Date: January 15, 2020

Lam TCP 9600 CFE Metal Etcher, 6"
- Software version: E1.5E2
- CE mark certified
- SECS interface
- 208 V, 3 phase
- Gas panel type: Standard / CES
- Standalone etcher mainframe type
- Microwave strip, DSQ, PLL
- Signal lamp power
- Remote operator interface
- Helium cooling MFC type: Advanced ESC
- Heated pumping manifolds
- On-board RF generators
- WVDS
- DSQ type: hinged
- Hine 38A indexers
- Endpoint detection system
- Endpoint type: Photodiode / Monochromators
- TCP coil size: 6"
2003 Vintage

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