{"product_id":"53014","title":"SUSS M 6000 L Lift Off System","description":"SUSS M 6000 L Lift Off System, 3\" to 6\"\u003cbr\u003e- Cassette to Cassette handling\u003cbr\u003e- Lift-Off Process Chamber (Module)\u003cbr\u003e- High Pressure dispense arm for dispensing recirculated NMP\u003cbr\u003e- Fan jet nozzle for dispensing fresh NMP\u003cbr\u003e- N2 backside rinse\u003cbr\u003e- Stainless Steel filters\u003cbr\u003e- Pneumatically controlled centering jaws\u003cbr\u003e- Drive via indirect AC servo motor\u003cbr\u003e- Send\/Receive Module\u003cbr\u003e- System Robot\u003cbr\u003e- Rinse Module (DI water rinse wafers above and below)\u003cbr\u003e- DI Water rinse via puddle nozzle\u003cbr\u003e- 2-Tanks (1 for fresh, 1 for used NMP)\u003cbr\u003e- Chemical Delivery Cabinet\u003cbr\u003e- Power Supply\u003cbr\u003e- Emergency Off (EMO)\u003cbr\u003e- 2 Chillers\u003cbr\u003e2002 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814527135934,"sku":"53014","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/53014","provider":"Bridge Tronic Global","version":"1.0","type":"link"}