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SUSS M 6000 L Lift Off System

Asset #: 53014

Make: SUSS

Model: M 6000 L

Wafer Sizes: 3, 4, 5, 6 inch

Last Confirm Date: January 08, 2020

SUSS M 6000 L Lift Off System, 3" to 6"
- Cassette to Cassette handling
- Lift-Off Process Chamber (Module)
- High Pressure dispense arm for dispensing recirculated NMP
- Fan jet nozzle for dispensing fresh NMP
- N2 backside rinse
- Stainless Steel filters
- Pneumatically controlled centering jaws
- Drive via indirect AC servo motor
- Send/Receive Module
- System Robot
- Rinse Module (DI water rinse wafers above and below)
- DI Water rinse via puddle nozzle
- 2-Tanks (1 for fresh, 1 for used NMP)
- Chemical Delivery Cabinet
- Power Supply
- Emergency Off (EMO)
- 2 Chillers
2002 Vintage

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