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EVG 520 IS UV NIL Bonder
EVG 520 IS UV NIL Bonder
EVG 520 IS UV NIL Bonder
EVG 520 IS UV NIL Bonder

EVG 520 IS UV NIL Bonder

Asset #: 53001

Make: EVG

Model: 520 IS

Wafer Sizes: 8 inch

EVG 520 IS UV NIL Bonder, 8"
- Max Overpressure: 1 Atmosphere for Contactless Pressurization of Pre-Bonded Wafer Pairs
- Max Contact Force Created by One Atmosphere Pressure Differential (<14.5 PSI)
- Atmospheric Capabilities down to 1 x 10 -1 mbar (7.5 x 10 -2 Torr)
- Pump Time Capability < 1min from 1000 to 5 mbar
- Purge Time Capability < 10sec from high vacuum to 1 bar
- Heating Capability on Bottom Side Heater
- 1 UV-Lightsource
- 400W Light Source for UV-adhesive Curing (wave length 300-500 nm)
- Operations manual and documentation
2007 Vintage

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