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Electroglas 4090 u Film Frame Prober
Electroglas 4090 u Film Frame Prober
Electroglas 4090 u Film Frame Prober
Electroglas 4090 u Film Frame Prober
Electroglas 4090 u Film Frame Prober

Electroglas 4090 u Film Frame Prober

Asset #: 52659

Make: Electroglas

Model: 4090 u

Wafer Sizes: 4, 5, 6, 8 inch

Last Confirm Date: December 20, 2019

Electroglas 4090 u Film Frame Prober, 4", 5", 6", 8"
WAFER HANDLING
- 1 cassette of 25 or 26 slots
- Sequential
- Programmable access controllable via external I/O
- Auxiliary wafer tray
- Quick single wafer insertion and extraction
- Cross slot wafer detection
- Quick loader station
- Intelligent quick load pipelining
ACCURACY
± 4μm (system accuracy includes X, Y, Ø and Z)**
**definition available upon request
XY POSITIONING
- Travel – 19.80″ (503mm) X, 9.42″ (239mm) Y
- Maximum Speed – 10.0 in/sec (254.0 mm/sec)
- Maximum Acceleration – 1.1G X axis, 0.53G Y axis
- Resolution – 0.01 mils (0.25μm)
- Repeatability – 0.01 mils (0.25μm) CHUCK TOPS
- Standard – ambient probing
- Hot – ambient to 130ºC

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