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Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper
Nikon NSR 2205 i 11 D i-Line Stepper

Nikon NSR 2205 i 11 D i-Line Stepper

Asset #: 52618

Make: Nikon

Model: NSR 2205 i 11 D

Nikon NSR 2205 i 11 D i-Line Stepper
- MCSV Basic version: 2.31D
- OCS Option: 2.18A
- Main system: 2.42A
- Reticle loader
- Stage
- Operation panel
- Wafer loader
- Lens controller
- Alignment
- System: VAX4000.90A
- Hard disk: DKA200, DKA300
- Illumination type: SHRINC3
- Revolver type: Conv, ann, small
- Chuck type, 8"
- Screw type: Ball
- Reticle alignment: VRA, ISS
- Reticle microscope
- Wafer alignment: LSA, FIA
- Multiple auto focus
- Wafer loader, 8"
- Loader type: Type2 (A3)
- OF Type: Notch
- Flatzone: 6 O'Clock
- Cassette: Left and right
- Control rack position: Right side
- Reticle loader, 6"
- (13) Slots
- Wafer flatness: 1.510 um
- Wafer leveling: X: -0.248 sec, Y: 0.049 sec
- Reticle blind setting accuracy: XP: 0.5 mm, Xm: 0.6 mm, Yp: 0.7 mm, Ym: 0.5 mm
- Stepping: 3σ-X: 0.025 um, 3σ-Y: 0.023 um
- INC Adjustment: Maximum-minimum: 0.311 um, Curvature: 0.010 um, UR-LL: -0.056 um, UL-LR: 0.081 um
- DIS Adjustment: Maximum-X: 0.037 um, Maximum-Y: 0.047 um, Minimum-X: -0.051 um, Minimum-Y: -0.044 um
- Exposure power: 565 mw/cm²
- Power uniformity: 0.934%
1996 Vintage

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