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Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator
Semicore E-Gun Thermal Evaporator

Semicore E-Gun Thermal Evaporator

Asset #: 50640

Make: Semicore

Model: -

Last Confirm Date: September 24, 2019

Semicore E-Gun Thermal Evaporator
Four Electron Beam Crucible Pockets
- A set Thermal/Resistive of posts
Sample Mounting:
- Planetary Mounts (Conformal Coating)
25 - 3 inch wafers
8 - 4 inch wafers
10 - 6 inch wafers (2 planetary) - cross drilled enabling the mounting of small parts
Lift-off Mount (Non-Conformal Coating)
Components:
- Automated deposition controller
- Quartz Crystal Thickness/Rate Monitor
- Dry Pumping Package
- Cryo high vacuum pump
- Dry roughing pump
- Average pump down time of 1.5 hours from atmosphere to 1x10-6 Torr
- Chamber/Sample Heating (Heat Lamps)
- Additional electrical feedthroughs for accessories
Materials:
- Alumina (Al2O3)
- Aluminum (Al)
- Chromium (Cr)
- Colbolt (Co)
- Copper (Cu)
- Germanium (Ge)
- Gold (Au)
- Iron (Fe)
- Molybdenum (Mo)
- Nichrome (NiCr)
- Nickel (Ni)
- Palladium (Pd)
- Platinum (Pt)
- Silicon (Si)
- Silicon Dioxide (SiO2)
- Silver (Ag)
- Tantalum (Ta)
- Titanium (Ti)
- Titanium Dioxide (TiO2)
- Tungsten (W)
2000 Vintage

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