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CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator
CHA Mark 50 Vacuum Evaporator

CHA Mark 50 Vacuum Evaporator

Asset #: 50613

Make: CHA

Model: Mark 50

Wafer Sizes: 4, 6, 8 inch

CHA Mark 50 Vacuum Evaporator, 4", 6", 8"
- 6" Planetary holders: 3 planetary holders at 8 x 6" wafers for 24 wafers per load
- 8" Planetary holders: 3 planetary holders at 5 x 8" wafers for 15 wafers per load
- Used for straight forward backside metallization with Ti, Ni and Ag
- N2 process gas used (no aggressive gases like SF6)
- Pumps: CTI CT400, CTI Waterpump 1050, Edwards QDP 80
- Refurbished in 2009

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