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KLA P 10 Profilometer

Asset #: 49994

Make: KLA

Model: P 10

Wafer Sizes: 8 inch

Last Confirm Date: August 26, 2019

KLA P 10 Profilometer, 8"
- Sample size: up to 200 mm
- Low force head: 0.05 - 15 mg
- 0.05 mg resolution
- Step height repeatability: .001 μm max in the 13 μm range; 0.005 μm max in the 130 μm range
- Scan length: 150 mm
- Scan speed: 1 μm/sec to 25 mm/sec
- Scan sampling rates: 50, 100, 200, 500, 1000 Hz
- Vertical range: at 0.008 Å resolution: ±6.5 μm; at 0.8 Å resolutions: ±65 μm;
- at 0.6 Å resolutions: ±1000 μm
- Horizontal resolution at 1 μm/sec scan speed of 0.01 μm
- Angle resolution: 0.001°

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