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KLA Surfscan SP 1 DLS

Asset #: 48227

Make: KLA

Model: Surfscan SP 1 DLS

Last Confirm Date: June 13, 2019

KLA Surfscan SP 1 DLS
- S/W version. MX 4.20.7199 SR05
- Software Application Options
- Haze, Analysis & Normalization
- Option, InMatch
- XY Coordinates
- Normal & Oblique Illumination
- Hardware Configuration
- PC "Intel Pentium III CPU 997MHz RAM:1.00GB"
- Laser "Part Name:SSL Laser (Solid State Laser)
- Source:Solid State Power: 75mW
- Wavelength: 488nm" Load port
- 300mm Dual FIMS Bulkhead Asyst
- Two AdvanTag SingleWire CID Handler
- Puck Handling - 300 mm
- 21 ROBOT,ASYST Ethernet
- E40/E94/E90
- E84 enabled for OHT & AGV/RGV E87 (Based on E39)
- GEM/SECS and HSMS
- NFS Client
- Others 4 Color Light Tower

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