{"product_id":"46421","title":"Tegal 6540","description":"Tegal 6540 , 6\"\u003cbr\u003e- 2x Ch Etch\u003cbr\u003e- 1x Ch Passivation\u003cbr\u003e- used for metal etch AlSi \/ AlSiCu\u003cbr\u003e- PM1 not functioning at shutdown;\u003cbr\u003e- PM2 in was up when shutdown but in bad condition;\u003cbr\u003e- PM3 (stripper) was up at shutdown;\u003cbr\u003e- PM4 (rinser) was up at shutdown\u003cbr\u003e- PM5 (align) was up at shutdown\u003cbr\u003e- CM1 (cassette module 1) was up at shutdown;\u003cbr\u003e- CM2 (cassette module 2) was up at shutdown;\u003cbr\u003e- TM1 (primary robot) was up at shutdown;\u003cbr\u003e- TM2 (secondary robot – atmosphere) not work properly at shutdown ( axis Z movement issue, belt to change);\u003cbr\u003e- Chillers in was up at shutdown;\u003cbr\u003e- RF gen in was up at shutdown","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814160494782,"sku":"46421","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/46421","provider":"Bridge Tronic Global","version":"1.0","type":"link"}