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Tegal 6540

Asset #: 46421

Make: Tegal

Model: 6540

Wafer Sizes: 6 inch

Last Confirm Date: April 03, 2019

Tegal 6540 , 6"
- 2x Ch Etch
- 1x Ch Passivation
- used for metal etch AlSi / AlSiCu
- PM1 not functioning at shutdown;
- PM2 in was up when shutdown but in bad condition;
- PM3 (stripper) was up at shutdown;
- PM4 (rinser) was up at shutdown
- PM5 (align) was up at shutdown
- CM1 (cassette module 1) was up at shutdown;
- CM2 (cassette module 2) was up at shutdown;
- TM1 (primary robot) was up at shutdown;
- TM2 (secondary robot – atmosphere) not work properly at shutdown ( axis Z movement issue, belt to change);
- Chillers in was up at shutdown;
- RF gen in was up at shutdown

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