{"product_id":"42099","title":"Lam Rainbow 4520 Oxide Etcher","description":"Lam Rainbow 4520 Oxide Etcher\u003cbr\u003e(2) RF Carts\u003cbr\u003eESC\u003cbr\u003eOptical non‐contact\u003cbr\u003eParticle reduction\u003cbr\u003eOrbital gas panel\u003cbr\u003eDownload recipe\u003cbr\u003eHe flow control mode: Recipe modeNo auto clean\u003cbr\u003eNo grey area operating system\u003cbr\u003eNo LAM Station EPT\u003cbr\u003eNo heating of gas lines\u003cbr\u003eNo heating of exhausts\u003cbr\u003eMTBC: 72 RF HoursClamping system\u003cbr\u003eGenerator: PDW 2200\u003cbr\u003eMatch: LoFAT\u003cbr\u003eThrottle valveTemperature control\u003cbr\u003eChamber upper \/ Lower (Not heated)\u003cbr\u003eLower electrode temperature: 0°C\u003cbr\u003eUpper electrode temperature: 40°CBallast \u0026amp; crossover\u003cbr\u003eCrossover gas number: 1\u003cbr\u003eCrossover gas flow: 300\u003cbr\u003eBallast gas number: 1\u003cbr\u003eBallast gas flow: 300Orbital gas panel\u003cbr\u003eGas 1: Ar, 1000 sccm\u003cbr\u003eGas 2: CF4, 200 sccm\u003cbr\u003eGas 3: CHF3, 100 sccm\u003cbr\u003eGas 4: N2, 50 sccm\u003cbr\u003eGas 5: O2, 20 sccm\u003cbr\u003eGas 6: SF6, 20 sccm\u003cbr\u003eGas 7: Ar, 100 sccm\u003cbr\u003eGas 8: CF4, 20 sccmChiller: 2080 Dual channel TCU\u003cbr\u003e1999 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44813234045118,"sku":"42099","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/42099","provider":"Bridge Tronic Global","version":"1.0","type":"link"}