{"product_id":"40277","title":"SPTS \/ STS MPX ICP (Inductively Coupled Plasma)","description":"SPTS \/ STS MPX ICP (Inductively Coupled Plasma), 4\" to 8\"\u003cbr\u003e- Carousel Load Lock (2-Wafer Carousel)\u003cbr\u003e- Heated Lower Chamber \u003cbr\u003e- Load-Lock Chamber \u003cbr\u003e- Helium Substrate Backside Cooling\u003cbr\u003e- Weighted Clamp \u003cbr\u003e- Edwards IH80 Vacuum Pump (Chamber)\u003cbr\u003e- Alcatel Adixen ACG 28G Vacuum Pump (Load Lock)\u003cbr\u003e- SMC Thermo Chiller \u003cbr\u003e- Electronics Rack \u003cbr\u003e- MKS Spectrum 1.5KW 13.56MHz RF Generator (Source)\u003cbr\u003e- ENI ACG3B 13.56MHz RF Generator (Lower Electrode)\u003cbr\u003e- Leybold MAG 1500 CT Turbo Pump \u003cbr\u003e- System Cables (full set)\u003cbr\u003e- SPTS PRO System Software\u003cbr\u003e- Verity Instruments SD1024F Smart Spectrograph EPD \u003cbr\u003e- User Manuals \u0026amp; Documentation \u003cbr\u003e2011 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806599147710,"sku":"40277","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/40277","provider":"Bridge Tronic Global","version":"1.0","type":"link"}