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SPTS / STS MPX ICP (Inductively Coupled Plasma)

Asset #: 40277

Make: SPTS / STS

Model: MPX

Wafer Sizes: 4, 5, 6, 8 inch

Last Confirm Date: September 18, 2018

SPTS / STS MPX ICP (Inductively Coupled Plasma), 4" to 8"
- Carousel Load Lock (2-Wafer Carousel)
- Heated Lower Chamber
- Load-Lock Chamber
- Helium Substrate Backside Cooling
- Weighted Clamp
- Edwards IH80 Vacuum Pump (Chamber)
- Alcatel Adixen ACG 28G Vacuum Pump (Load Lock)
- SMC Thermo Chiller
- Electronics Rack
- MKS Spectrum 1.5KW 13.56MHz RF Generator (Source)
- ENI ACG3B 13.56MHz RF Generator (Lower Electrode)
- Leybold MAG 1500 CT Turbo Pump
- System Cables (full set)
- SPTS PRO System Software
- Verity Instruments SD1024F Smart Spectrograph EPD
- User Manuals & Documentation
2011 Vintage

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