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KLA Alpha Step IQ Surface Profilometer

Asset #: 40270

Make: KLA

Model: Alpha Step IQ

Wafer Sizes: 6 inch

Last Confirm Date: September 18, 2018

KLA Alpha Step IQ Surface Profilometer, 6"
- Scan length: 10mm
- Scan Speed: 2um/s to 200um/s
- Step Height Repeatability: 7.5Γ… or 0.1% of measured vertical range
- Computer Controlled Scanning and Data Collection
- Comprehensive Data Analysis Software
- Intuitive User Interface
- Zoom Optics with Magnification up to 210x
- Multi-Scan average mode scans up to 10 times and then averages the scan before print out
- Powerful Data Analysis w/ up to 30 standard surface parameters selections
- Accurate Surface Characteristic Measurement
- 2D Step Height Metrology Profiling
- Operations Manual and Documentation

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