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CVC 601 Sputter Deposition
CVC 601 Sputter Deposition

CVC 601 Sputter Deposition

Asset #: 40147

Make: CVC

Model: 601

CVC 601 Sputter Deposition
-Advance Energy ID 3500 Ion Beam Drive
-We have two: Advance energy MDX magnetron Drive (one in tool, and one
spare)
-CVC Scienctific Products KR1 and KR3 RF sputtering power supplies and matching networksTargets:
· Al
· Al / 1%Si
· Al / 1%Si / 4%Cu
· Co
· CoFeAl
· Cr
· Ir
· MgO
· Mo
· MoSi2
· Nb
· Si
· Ti
· TiW
· W

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