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Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace
Thermco 6204 Horizontal Diffusion Furnace

Thermco 6204 Horizontal Diffusion Furnace

Asset #: 35683

Make: Thermco

Model: 6204

Wafer Sizes: 4, 6 inch

Thermco 6204 Horizontal Diffusion Furnace, 4", 6"
- Semy Controller
- Max Temp: 1250C
- 3 Control Zones
- Overtemperature Protection
- Left-hand Load Station
- (Qty 4) Furnace Tubes:
Furnace Tube #1: Platinum Diffusion Process
- Gas System Process Gases:
- 95%N2/5%H2 30 SLM UNIT 8100
- N2 20 SLM - UNIT 8100
- H2 30 SLM - UNIT 8100
- O2 20 SLM - UNIT 8100
- O2 500 SCCM - UNIT 8100
- Cantilever Loader:
- Cryco 2" SHANK SiC D LOADER
- Element: Helix II HC-58 DR
Furnace Tube #2: Process - CVD
- Gas System Process Gases:
- 95%N2/5%H2 30 SLM - UNIT 8100
- N2 20 SLM – UNIT 8100
- H2 30 SLM - UNIT 8100
- O2 20 SLM - UNIT 8100
- O2 500 SCCM - UNIT 8100
- Cantilever Loader:
- Cryco for 2" SiC Motion Loader
- Helix II HC-58 DR
Furnace Tube #3: Process - Sinter
- Gas System Process Gases:
- 95%N2/5%H2 30 SLM - UNIT 8100
- N2 20 SLM – UNIT 8100
- H2 30 SLM - UNIT 8100
- O2 20 SLM - UNIT 8100
- O2 500 SCCM - UNIT 8100
- Cantilever Loader:
- Cryco for 2" SiC Motion Loader
- Helix II HC-58 DR
Furnace Tube #4: Process - Aluminum
- Gas System Process Gases:
- 95%N2/5%H2 30 SLM - UNIT 8100
- N2 20 SLM – UNIT 8100
- H2 30 SLM - UNIT 8100
- O2 20 SLM - UNIT 8100
- O2 500 SCCM - UNIT 8100
- Cantilever Loader:
- Cryco for 2" shank paddle Motion Loader
- Helix II HC-58 DR
- 480Vac, 3 Phase, 60Hz, 250 amps

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