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KLA Archer 10 XT Overlay System

Asset #: 34804

Make: KLA

Model: Archer 10 XT

Last Confirm Date: April 16, 2018

KLA Archer 10 XT Overlay System
- 300mm Dual FIMS 25 wafer
- Archer standard skin
- Archer Analyzer:
- Archer Analyzer tool client CD-ROM
- Archer Utility server
- Communication Option:
- GEM/SECS HSMS - E84 HOKUYO OHT device (2 device with 5m cable) 4-3, E87 Career management service (E39 base) - E40/E94 Process job management control (E39 base)
- E90 substrate tracking (E39 base) - Career ID Bar single wire
- Keyence #BL-601HACIS(7101) “Class-1 laser” (2CID device)
- Safety skirt (Standard panel)
- Measurement system option
- ANRA measurement software
- RDM tool client
- ASYST series 3 load port
- Offline recipe creation function option
- 300mm reflect type host chuck
- RDM tool client
- Line conditioner 50Hz
- 10m system power cable
- EQR fixing kit (Fixing parts, Plate)
- Procon System w/Signal tower
- Rack
- KLASS analyzer station

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