{"product_id":"33881","title":"Ulvac CE 300 i RIE (Reactive Ion Etcher)","description":"Ulvac CE 300 i RIE (Reactive Ion Etcher), 3\"\u003cbr\u003e- Load Lock\u003cbr\u003e- RF discharge source \u003cbr\u003e- Inductive Coupled Plasma (ICP) \u003cbr\u003e- RF frequency : 13.56MHz RF power\u003cbr\u003e- ICP assembly upper electrode: Max 1000W\u003cbr\u003e- RF biased lower electrode: Max 300W Control of discharge impedance\u003cbr\u003e- Auto Purge gas: N2* Temperature control of sample substrate: water circulator and He gas Wafer hold type \u003cbr\u003e- Electrostatic chuck Target materials : Mo, TiN, NbN, Si* Wafer tray: quartz \"\u003cbr\u003e- Gasses: SF6, CF4, C4F8, O2\u003cbr\u003e- Available for automatic recipes\u003cbr\u003e- Abatement Pump","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44813006667966,"sku":"33881","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/33881","provider":"Bridge Tronic Global","version":"1.0","type":"link"}