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EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer
EVG 150 Automated Coater / Developer

EVG 150 Automated Coater / Developer

Asset #: 33745

Make: EVG

Model: 150

Wafer Sizes: 4, 5, 6, 8 inch

EVG 150 Automated Coater / Developer, 4" to 8"
- Windows
- Software release: EVG150 4,2,3,72
- 4 pumped lines. 4 IDI Cybor pumps, model 5026, with one pump controller (4 ports)
- 1 coater station with cup rinse cover and 1 develop station, 4 pumped lines of resist with balance. 3 pressurized  lines for promoter and develop chemistry with canister and balance. Automatic shutter on solvent exhaust (avoid having chemistry in the pipeline). Gentoolbox included for Genmark GB 7 P robot
2003 Vintage

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