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Veeco Nexus LDD Ion Beam Deposition (IBD)

Asset #: 33345

Make: Veeco

Model: Nexus LDD

Last Confirm Date: February 28, 2018

Veeco Nexus LDD Ion Beam Deposition (IBD)
- Brooks Automation SLR 200X-rot 30M/L. The tool is designed to handle 6” reticles
- Load chamber, process chamber, controls, pumps for process chamber, another view of process chamber, other side of load chamber, control racks, 2 pumps (IQDP40 & IQDP80), 3 compressors (CTI 9600), power panel
- The tool was operational and last used in 2015

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