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SVTA MBE Thin Film Deposition System

Asset #: 31907

Make: SVTA

Model: -

Last Confirm Date: January 16, 2018

SVTA MBE Thin Film Deposition System
- Load lock with magnetic loading arm
- Heated rotating substrate stage
- Electronically controlled high-vac gate with automatic safety shutoff
- 8 effusion cells
- Cryopump
Austin Scientific
Model: CP-8-UHV
Uses Austin Scientific M125 air cooled helium compressor
- Turbopump
Pfeiffer
Model: TMU 071 P
- Mechanical Pump
Franklin Electric
Model: 1101006149
- Convection gauge on loadlock
- Ion gauge for main chamber
- Granville-Phillips 307 Vacuum Gauge Controller x2
- Granville-Phillips 350 Ionization Gauge Controller x1
- Eurotherm 2408 controller x8
- Eurotherm 2216 controller x1
- Sorensen DC560-18E power supply x7
- Sorensen DCS 80-37 power supply x1
- Sorensen DLM 40-15 power supply x1
- Infinicon XTC/2 Deposition Controller x1
- MKS Vac-Check LM78 Residual Gas Analyzer x1
- Inficon XTC/2 Deposition Controller
- Granville-Phillips 307 Vacuum Gauge Controller

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