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Applied Materials P 5000 CVD (Chemical Vapor Deposition)
Applied Materials P 5000 CVD (Chemical Vapor Deposition)
Applied Materials P 5000 CVD (Chemical Vapor Deposition)
Applied Materials P 5000 CVD (Chemical Vapor Deposition)
Applied Materials P 5000 CVD (Chemical Vapor Deposition)
Applied Materials P 5000 CVD (Chemical Vapor Deposition)
Applied Materials P 5000 CVD (Chemical Vapor Deposition)

Applied Materials P 5000 CVD (Chemical Vapor Deposition)

Asset #: 31484

Make: Applied Materials

Model: P 5000

Wafer Sizes: 6 inch

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Applied Materials P 5000 CVD (Chemical Vapor Deposition), 6"
1. What is the mainframe Type? MARKII
2. What type of robot does it have? Single Blade with capacitive sensors
3. What is the Wafer Size? What is the wafer shape? SNNF(Notch)? 6” ( robot and chambers 8” compatible), wafer flat
4. Does it have SMIF Interface? No
5. What are the power requirements? 90 KVA, 208 VAC, 3 phases, 5 Wires 50/60 hz
6. Does it have a Loadlock Pump? Dry IQDP 80
7. Does it have Loadlock Slit Valve O Rings? Yes
8. Does it have Wafer Out of Cassette Sensor? Yes
9. Does it have Present Sensor? If K 7 present sensor, Yes
10. What type of Heat Exchanger does it have? How many? AMAT1 x 1
11. Chambers:
i. Chamber A:
a. What type of Chamber? CVD Chamber
b. What process? Oxide
a. What is the ESC Type? P-chuck with Standard lift pin
b. What type of Chamber Pump? DRY QDP 80
c. What type of Turbo Pump? None
d. What type of RF Generator ENI OEM 12 B
e. How many gas lines and what gas types? 8- Silane, Ar, N2, CF4, N20
ii. Chamber B:
a. What type of Chamber? CVD Chamber
b. What process? Oxide / Nitride
a. What is the ESC Type? P-chuck with Standard lift pin
b. What type of Chamber Pump? DRY IQDP 80 + ROOTS 250
c. What type of Turbo Pump? None
d. What type of RF Generator ENI OEM 12 B
e. How many gas lines and what gas types? 8- Silane, Ar, N2, CF4, N20
2002 Vintage

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