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Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher

Lam Rainbow 4420 Plasma Etcher

Asset #: 31043

Make: Lam

Model: Rainbow 4420

Wafer Sizes: 8 inch

Last Confirm Date: July 16, 2018

Lam Rainbow 4420 Plasma Etcher, 8"
- Last PM: 11/11/2016
- Install Type: Thru-the-wall (TTW)
- Status Lamp
- System software (App): Envision ver1.5.1
- SECS I Interface
- Cassette Interface: (2) Hine 38F indexers
- Electrostatic Chuck (ESC)
- Endpoint Detection: Monochromator 405nm / 520nm
- Turbo: Seiko Seiki STP H200C
- RF Match Type: LAM
- On-board RF Generators: No
- RF Generator: ENI OEM-650A
- RF Hours: 402056
- Remote RF Cart: No
- ATM Passivation Module: No
- Plasma LLK (PLL): No
- High Conductance Manifold: No
- Gas Box:
- Remote Gas Box: No
- Orbitally Welded GB: Yes
- Backside Cooling MFC: Unit 1250A
- Gases:
- #1: N2, 200 sccm, Unit 1200A
- #2: CHF3, 50 sccm, Unit 1200A
- #3: N2, 300 sccm, Aera
- #4: N2, 500 sccm, Unit UFC 1660
- #5: CF4, 150 sccm, Unit 1200A
- #6: SF6, 150 sccm, Unit 1200A
- #7: He, 1 slm, Unit UFC 1660
- #8: O2, 200 sccm, Unit UFC 1660
- Pumps:
- Heated pumping manifolds: No
- Pump controller: iQ Series
- Entrance / Exit: Edwards iQDP-40
- Main: Edwards iQDP-80
- Chiller(s): (2) SMC HRS018-WN-20-M
- On-board AC Distribution Type: Fused
- Power Requirements: 208VAC, 3-Phase, 5-Wire
1993 Vintage

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