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ALSI ICA 1204 Laser Ablation Tool

Asset #: 31019

Make: ALSI

Model: ICA 1204

Last Confirm Date: March 30, 2018

ALSI ICA 1204 Laser Ablation Tool
Optics 1:                          Multi beam optics split to 6 beams
Optics 2:                          SDU (Secondary Doe Unit) for dash cutting
Laser:                                JDSU Q-Series UV 355nm (non-operable)
Module:                            Coater/Cleaner unit
Wafer Size:                     Currently fitted to process up to 100mm wafers
Tape Frame Size:        Current fitted for Disco frame #261 (8.9” OD x 7.6” ID)
Other Equipment:       Keller Debris Separation Exhaust System


2012 Vintage

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