{"product_id":"30560","title":"Vacutec RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)","description":"Vacutec RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- Two, Chamber Etch \u0026amp; Deposit\u003cbr\u003e- PECVD: SiNx Deposition\u003cbr\u003e- RIE: SiNx Etch\u003cbr\u003e- Gas Lines PECVD: SiH4, Ar, N2, NH3, SF6\u003cbr\u003e- Gas Lines RIE: Ar, O2, CF4, SF6\u003cbr\u003e- Pumps: with Rotary and Rootsblower (1), with Rotary and Turbo (1)\u003cbr\u003e- RF Generator: ENI ACG5 500W\u003cbr\u003e- Including Sofie Camera for endpoint detection. \u003cbr\u003e- The control software is not working","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812755370174,"sku":"30560","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Vacute-3_Page_1_Image_0002-done.jpg?v=1737449406","url":"https:\/\/www.bridgetronic.com\/products\/30560","provider":"Bridge Tronic Global","version":"1.0","type":"link"}