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Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200
Oerlikon Balzers Clusterline 200

Oerlikon Balzers Clusterline 200

Asset #: 29271

Make: Oerlikon Balzers

Model: Clusterline 200

Wafer Sizes: 6 inch

Oerlikon Balzers Clusterline 200 , 6"
- The system has a load-lock with cass (150mm/6”wafers) with turbo pomp.
- Transfer chamber turbo pump.
- 1 sputter-etch chamber , with turbo pump
- 1 sputter chamber, lamp heated and rotation magnets with turbo pump
- Magnetron has rotation magnets
- System was used for sputtering of alu and alu nitride
- System has a dual arm robot. System is shut down after full operation mode.
2000 Vintage

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