Mattson 2800 RTP System (Rapid Thermal Process), 8"
- Dual Load Lock
- Single Chamber
30L N2high
- 50psi @ facilities, 2bar @ tool, Dynamic (full N2 flow)
- 60psi @ facilities, 2.8bar @ tool, Static (no N2 flow)
10L O2high
- 40psi @ facilities, 2bar @ tool, Dynamic (full O2 flow)
- 42psi @ facilities, 2.5bar @ tool, Static (no O2 flow)
O2low
- 40psi @ facilities, 2bar @ tool, Dynamic (full O2 flow)
- 42psi @ facilities, 2.5bar @ tool, Static (no O2 flow)
10L Ar
- 40psi @ facilities, 2bar @ tool, Dynamic (full Ar flow)
- 43psi @ facilities, 2.5bar @ tool, Static (no Ar flow)
CDA:
- Facililties: -90psi
- Tool: -5.5bar
Chamber High Cool:
- Bottom: 17/18 m3/h
- Top: -26/27 m3/h
Chamber H20 Cooling: @facilities - 6.8LPM
O2 Sensor final testing:
- 30L N2 flow in chamber @ 30 second - 3ppm O2
- 5L N2 flow in chamber @ 60 seconds - 4-5ppm O2
Robot Station Names:
- A: primary sender
- I: secondary receiver
- F: furnace - D: cooling station 0
– cooling station 1 (no cooling station 1, used for dummy station)
- C: dummy wafer station
Pyrometer Calibration:
- Un-calibrated Pyrometer check – Pyro 878C output at 1080TC with emis1300
- Calibration Recipe – TOMCAL.2
- Calibration File - TRCAL0923

Facilities Connections at Bottom Rear of Tool:
- CDA 1/4 Inch Swagelok 90-120PSI
- PCWS 1/2 Inch Swagelok 8slpm
- PCWR 1/2Inch Swagelok 60-120PSI
- PCWS 1/2Inch Swagelok
- PCWR 1/2Inch Swagelok
- HiFlow N2 1/2Inch Swagelok >90PSI in operation
- Cooling N2 1/4Inch Swagelok 10-30SLPM
- Vent1 3/8Inch Swagelok - Acid Exhaust(separate all the way
to main exhaust pipe)
- Vent2 3/8Inch Swagelok - Acid Exhaust(separate all the way
to main exhaust pipe)
- 11/2 Inch Exhaust 11/2Inch Tube Acid Exhaust
Middle Bottom of Tool: Blower Output 4Inch Tube Heat Exhaust
Front of Tool: House Vacuum 1/4Inch Swagelok 600 mbar
Electrical Requirements:
- Power Consumption 43KVA
- Voltage 208VAC 3phase
- Current per Phase 125amps
125max fusable