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Denton Explorer 14 Sputtering Tool
Denton Explorer 14 Sputtering Tool
Denton Explorer 14 Sputtering Tool
Denton Explorer 14 Sputtering Tool
Denton Explorer 14 Sputtering Tool
Denton Explorer 14 Sputtering Tool

Denton Explorer 14 Sputtering Tool

Asset #: 28642

Make: Denton

Model: Explorer 14

Last Confirm Date: August 29, 2017

Denton Explorer 14 Sputtering Tool
- KYKY 600 l/s turbo-molecular pump (6.0” inlet flange, particulate screen, water-cooled).
LN2 trap:
- Varian DS 402 two-stage, rotary vane pump (14 CFM):
- Chamber: 12” (high) x 18” (wide) x 18” (deep)
- (3) 3.0” diameter, internal “stalk-mount”, planar magnetron sputter source:
- RF/DC capability
Configuration: either straight down sputtering or con-focal sputtering
- DVI 12” diameter copper plate, water-cooled, substrate stage assembly
- Xantrex DC power supply (600 volts, 4 amps).
- 600 Watt Seren RF power supply coupled to an automatic matching network.
- Substrate rotation: (0 - 20 RPM)
- Interfaced to system PLC for remote on/off operation.
- ProcessProTM control software configured for specific delivered hardware
2007 Vintage

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