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Tel Act 12 Coater / Developer

Asset #: 28600

Make: Tel

Model: Act 12

Last Confirm Date: August 28, 2017

Tel Act 12 Coater / Developer
- 2 Wafer Transfer Robot Arms: 1 Carrier, 1 Process
- 3 FOUP Loader Port
- SECS/GEM I/II Interface required is iUSC
- 2 SOG Coater Process Station
* 2 SOG Nozzles w/ Temperature Control
* 4 Solvent Capability
* TARC Compatible: Teflon Coated Chamber
* PTI Mass Flow Exhaust Controller
* Temperature Humidity Control
* 1 Set of SS Back Rinse and Cup Rinse Nozzles
- 4 Chill Plate Process Station
- 1 Transfer Chill Plate Process Station
- 3 Transfer Low Temperature Hot Plate (LHP)
- 6 High Temp Hot Plate Process Stations (HHP)
- 1 TEL Temperature and Humidity Controller
- Side Chemical Cabinet
* 8 – 2.5 L Bottle Storage Capacity
* 4 – 2.5 L Bottle Storage Capacity
* 4 – 12 L Tank Solvent Canisters
- 1 AC Power Box

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