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Thermo Fisher Scientific / FEI 1265 Dual Beam FIB (Focused Ion Beam)

Asset #: 26694

Make: Thermo Fisher Scientific / FEI

Model: 1265

Thermo Fisher Scientific / FEI 1265 Dual Beam FIB (Focused Ion Beam)
- Electron beam image resolution: 3nm-5nm, 1-30kV beam voltage
- Ion beam resolution: 5nm-7nm, 30kV beam voltage
- Full digital control through Windows environment
- Stage Accuracy: 1.5 µm over 300mm
- FE-SEM with through-the-lens detection
- 1 Load Lock - allows loading of the following: a 200mm wafer, a 300mm wafer, and a 200mm multi-stub holder (for single die, and other small die samples)
- GISs - allow for PD (Platinum Deposition), IEE (Insulator Enhanced Etch) and ID (Insulator Deposition)
- EDX Analysis - on defects (down to 0.2 microns in size)
*This facility requires LN2, the EDX is supplied/serviced by Oxford Instruments.
- No Load Ports
- SECS/GEM Capability

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