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Lam / Novellus Concept One CVD (Chemical Vapor Deposition)

Asset #: 24630

Make: Lam / Novellus

Model: Concept One

Wafer Sizes: 6 inch

Last Confirm Date: June 08, 2017

Lam / Novellus Concept One CVD (Chemical Vapor Deposition), 6"
- Concept One 150mm Base System
- Micro-Contamination Package
- Dual Frequency system with AE LF PDX 1400 Generator - CE Mark
- New Generation Process 150mm Gas Box, 9 Channel, STEC Horiba Z500 digital MFC's with LOTO's
- Standard Slot 150mm Heater Block. - VCR Gasline Interconnect. - External Heated Pendulum Valve. - 586 Computer with Flash Drive. - Digital Pressure/Temperature Control Unit. - Robot with 70V Motors and OEM 750 Driver Kit. - Front Flat Panel Touchscreen. - Side Monitor. - AC and RF Ceramic Feedthru's. - FerroFluidic Spindle. - AE Matching Network. - RF Detector Endpoint System. - RF Enclosure. - Megapak Power Supply. - Sapphire Window. - One Piece Loadlock Door Shaft. - Standard Front Facia - Aqueous paint. - SECS II communications interface. - AE RFG3000 2.75 KW HF Generator - CE Marked, interlock standard.
- AC Remote Pump Interface for ACP pumps and with AE LF Generator.
- Main System Control Cable CA 99 - 40 ft. - RF Generator Control Cables for AE Generators - 20 ft. - HF RF Cable for 3 KW generator CA 57 - 60 ft. - LF RF Cable CA 102 - 60 ft. - Pump Control Cable to be used with ACP type interfaces - 10 ft.

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