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CPA V 2000 Five Target RF and DC Magnetron In Line Sputtering System

Asset #: 24294

Make: CPA

Model: V 2000

Last Confirm Date: June 05, 2017

CPA V 2000 Five Target RF and DC Magnetron In Line Sputtering System
- Currently configured for single sided sputtering but cathodes can be moved manually if double sided sputtering is desired
- Target Size: 3-1/2 in. x 18 in
- Easy access to cathodes via hinged doors
- Currently configured with 4 DC and 1 RF cathodes
- Multiple CTI cryopumps for high vacuum
- Load lock chambers on both ends
- Loader handles up to 28 20 in
- H panels or pallets
- Variable speed pallet transport system

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