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Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)
Denton 502 A PVD Cluster (Physical Vapor Deposition)

Denton 502 A PVD Cluster (Physical Vapor Deposition)

Asset #: 23398

Make: Denton

Model: 502 A

Last Confirm Date: May 25, 2017

Denton 502 A PVD Cluster (Physical Vapor Deposition)
- All power supplies – custom built – very little use
- Large custom chamber with a steel door, window and water cooling
- Sputtering head
- Thermal evaporation
- E-beam evaporation (3 pocket – externally rotatable)
- Shutter
- Film thickness monitor
- Rotatable sample stage
- Evaporation sources cannot be used all at once
- Diffusion pumped
1995 Vintage

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