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Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)
Speedfam 676 CMP (Chemical Mechanical Polisher)

Speedfam 676 CMP (Chemical Mechanical Polisher)

Asset #: 23354

Make: Speedfam

Model: 676

Last Confirm Date: January 11, 2023

Speedfam 676 CMP (Chemical Mechanical Polisher)
- Four wafer planarizers
- Three cassette tilter load/unload station
- Advanced pad motion control
- High speed polish drive (0-600 RPM)
- Closed loop delta P control
- Endpoint detection system
- Stainless steel polish bell
- Dual pad conditioning systems
- Upgraded 500MHz Pentium

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