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CHA SE 600 High Vacuum E-Beam Evaporation System
CHA SE 600 High Vacuum E-Beam Evaporation System
CHA SE 600 High Vacuum E-Beam Evaporation System
CHA SE 600 High Vacuum E-Beam Evaporation System
CHA SE 600 High Vacuum E-Beam Evaporation System

CHA SE 600 High Vacuum E-Beam Evaporation System

Asset #: 22653

Make: CHA

Model: SE 600

CHA SE 600 High Vacuum E-Beam Evaporation System
- Used thin film deposition system
- PVD physical vapor deposition system
- 19 in. dia. water cooled bell jar
- Triple dome planetary fixturing currently configured for 3 in. dia. wafers
- Inficon IC6000 crystal deposition rate monitor
- Automatic valve sequencer
- Four pocket E-gun with manual rotation control
- Does not have auto pocket sequencer, manual only
- Temescal CV-8 E-Beam power supply with controls
- System uses a Varian VHS-6 diffusion pump for high vacuum
- Roughing pump included

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