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CHA SE 1000 RAP Multiple Source E-Beam and Thermal Evaporator

Asset #: 22650

Make: CHA

Model: SE 1000 RAP

Last Confirm Date: May 18, 2017

CHA SE 1000 RAP Multiple Source E-Beam and Thermal Evaporator
- for Optical Films and Oxygen Reactive Evaporations
- Used thin film deposition system
- Inficon IC-4 Plus rate and deposition controller
- Six pocket electron beam source with SR-10 E-Beam power supply
- Parts for optical monitor with system but not tested or covered under warranty
- Two outrigger style filament resistance sources with 6 kW SCR controlled power supply
- Automatic valve sequence controller
- 25 in. dia. x 30 in. tall water cooled bell jar
- Pressure control system for oxygen reactive evaporations
- VHS-10 high speed diffusion pump with roughing pump
- Quartz substrate heaters
- Slide type fixturing for lift off process
- Does not use substrate rotation type fixturing

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