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CHA SEC 600 RAP E-Beam Evaporator

Asset #: 22649

Make: CHA

Model: SEC 600 RAP

Last Confirm Date: May 18, 2017

CHA SEC 600 RAP E-Beam Evaporator
- Used thin film deposition system
- High vacuum electron beam deposition system- 19 in. dia. water cooled bell jar
- 6 pocket e-gun with SR-10 power supply and sweep controls
- Inficon IC/4 crystal deposition monitor
- CTI on board cryopump with compressor and roughing pump
- Auto-Tech II vacuum controller
- Fixture rotation controller and motor but does not include substrate fixturing
- Heater power supply but no heaters currently installed

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