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Tel Mark 7 N Clean Track

Asset #: 22014

Make: Tel

Model: Mark 7 N

Wafer Sizes: 8 inch

Last Confirm Date: May 10, 2017

Tel Mark 7 N Clean Track, 8"
- Carrier Station C/S
- 2 Coater RRC/EBR, R1 und R2 with GEN2 Pumps(not all pumps installed)
- 2 Developer with H-Nozzle and Rinse
- 1 AD Unit
- 8 Hotplates (Low Oven)
- 2 DHP (High Oven)
- 5 Cool plates
- 1 WEE
- 1 Cup Wash function
- Canon FPA i5 Interface
- Temp./Hum. Unit for Coater
- Temp./Hum. Unit for Developer
- Solvent Supply for each Coater
- Developer Supply for Dev.
1996 Vintage

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