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ASML 300 DUV Stepper (Deep Ultraviolet)

Asset #: 21948

Make: ASML

Model: 300

Wafer Sizes: 6 inch

Last Confirm Date: February 13, 2018

ASML 300 DUV Stepper (Deep Ultraviolet), 6"
- Lens under N2 Purge, unit stored in cleanroom
COMMENT TZ=factory
SW_RELEASE 080900
WAFER_STEPPER
OPTIONS
SECS
REFL_IMAGE_SENSOR
ARMS
PEP_1_PRODUCTIVITY_UPGRADE
PEP_2_PRODUCTIVITY_UPGRADE
RETICLE_ERROR_COMPENSATION
FLATNESS_MODEL
LSQ_DISTO_MODEL
MARK_SENSOR
BATCH_STREAMING
INTENSITY_2
FOCUS_MONITORING
AERIAL
IRIS
FLEXIBLE_SIGNAL_TOWER
EXTENDED_NA_RANGE
FOCAL_ADJUSTMENT
EXTENDED_EXPOSURE
TIS
ATHENA
FAST_TTL_ALIGNMENT
AUTOMATED_DOE_EXCHANGER
PHASE_MODULATOR_FTTL
PHASE_MODULATOR_OA
ALIGNMENT_REPORTS
ANNULAR_ILLUMINATION
ATHENA_ALLOW_HIGH_ORDERS
SCRIBELANE_MARKS
LIBRARY_CONFIG_3
VISUAL_ALIGNMENT_CAMERA
COMMENT TZ=factory
SW_RELEASE 080900
WAFER_STEPPER
OPTIONS
SECS
REFL_IMAGE_SENSOR
ARMS
PEP_1_PRODUCTIVITY_UPGRADE
PEP_2_PRODUCTIVITY_UPGRADE
RETICLE_ERROR_COMPENSATION
FLATNESS_MODEL
LSQ_DISTO_MODEL
MARK_SENSOR
BATCH_STREAMING
INTENSITY_2
FOCUS_MONITORING
AERIAL
IRIS
FLEXIBLE_SIGNAL_TOWER
EXTENDED_NA_RANGE
FOCAL_ADJUSTMENT
EXTENDED_EXPOSURE
TIS
ATHENA
FAST_TTL_ALIGNMENT
AUTOMATED_DOE_EXCHANGER
PHASE_MODULATOR_FTTL
PHASE_MODULATOR_OA
ALIGNMENT_REPORTS
ANNULAR_ILLUMINATION
ATHENA_ALLOW_HIGH_ORDERS
SCRIBELANE_MARKS
LIBRARY_CONFIG_3
VISUAL_ALIGNMENT_CAMERA
1998 Vintage

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