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KLA FLX 2320 FP Thin Film Stress Measurement System

Asset #: 20217

Make: KLA

Model: FLX 2320 FP

Last Confirm Date: April 18, 2017

KLA FLX 2320 FP Thin Film Stress Measurement System
- Flat panel sizes up to 550 x 650 mm
- Scan points: Maximum of 1250 per scan
- Light Source: Class IIIa laser 4mW power and 670nm wavelength and Class IIIb laser with 4 mW power and 750nm wavelength
- 115 V
- 8.0 A
- 50/60 Hz
- 1 Phase

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