{"product_id":"20175","title":"Plasmatherm VII 734 MF RIE (Reactive Ion Etcher)","description":"Plasmatherm VII 734 MF RIE (Reactive Ion Etcher), up to 8\"\u003cbr\u003e- Upper and lower electrodes: 12\" x 12\" w\/2\" - radius corners\u003cbr\u003e- Lower electrode: 80 to 350°C\u003cbr\u003e- System power center\u003cbr\u003eMass flow control\u003cbr\u003e- (8) MKS mass flow controls, 4 @ 200 sccm and 4 @ 100 sccm\u003cbr\u003e- Gases used: C2H4, N2O, CF4, Ar ,H2\u003cbr\u003eTemperature controller:\u003cbr\u003e- Tek-Temp Model MM1500\/3000\u003cbr\u003e- 208 V, 30 A, 60 Hz, 1 phase\u003cbr\u003e- 27\"W x 28\"D x 34.5\"H\u003cbr\u003e- Refrigerant R-12\u003cbr\u003e- Mechanical pumps not included.","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812552863934,"sku":"20175","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/20175","provider":"Bridge Tronic Global","version":"1.0","type":"link"}