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Plasmatherm VII 734 MF RIE (Reactive Ion Etcher)

Asset #: 20175

Make: Plasmatherm

Model: VII 734 MF

Wafer Sizes: 2, 3, 4, 5, 6, 8, 12 inch

Last Confirm Date: April 18, 2017

Plasmatherm VII 734 MF RIE (Reactive Ion Etcher), up to 8"
- Upper and lower electrodes: 12" x 12" w/2" - radius corners
- Lower electrode: 80 to 350°C
- System power center
Mass flow control
- (8) MKS mass flow controls, 4 @ 200 sccm and 4 @ 100 sccm
- Gases used: C2H4, N2O, CF4, Ar ,H2
Temperature controller:
- Tek-Temp Model MM1500/3000
- 208 V, 30 A, 60 Hz, 1 phase
- 27"W x 28"D x 34.5"H
- Refrigerant R-12
- Mechanical pumps not included.

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