{"product_id":"20168","title":"Plasmatherm 73 \/ 74 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)","description":"Plasmatherm 73 \/ 74 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition), up to 8\"\u003cbr\u003e- Eight Gas Inputs\u003cbr\u003e- RF Plasma RF-5 generator\u003cbr\u003e- MKS Type 252A exhaust valve controller\u003cbr\u003e- Watlow Series 808 electric heater control\u003cbr\u003e- RF Plasma AM-5 Automatching network (700)\u003cbr\u003e- Leybold WSU251\/D65BCS roots pumping system\u003cbr\u003e- Tek-Temp TKD100\/4000 chiller\u003cbr\u003e- Brooks 5850E Mass Flow Controllers","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812552569022,"sku":"20168","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/20168","provider":"Bridge Tronic Global","version":"1.0","type":"link"}