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Airco / Temescal BJD 1800 Filament Evaporator

Asset #: 20151

Make: Airco / Temescal

Model: BJD 1800

Last Confirm Date: April 18, 2017

Airco / Temescal BJD 1800 Filament Evaporator
Source Chamber:
- 18" Dia x 18" High, water cooled, 304 stainless steel
Source Tray
- 18" Dia flat plate with 10 1" dia. feedthrough ports
Source Configuration
- 2 crystal holders with shutters
- 1 EMI EMS 7.5V 600A DC Power Supply
- 2 Inficon feedthroughs with air
- 2 Oscillators
- 1 Inficon IC 5 Deposition Controller
- Granville Philips 307 Gauge Controller with process control
Power Req:
- 208 V
- 70.0 A
- 60 Hz
- 3 Phase

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