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SUSS Falcon ACS 200 Coater / Developer Cluster System

Asset #: 20121

Make: SUSS

Model: Falcon ACS 200

Wafer Sizes: 4, 6 inch

Last Confirm Date: April 18, 2017

SUSS Falcon ACS 200 Coater / Developer Cluster System, 4", 6"
- Fully Automated High Throughput
(2) Standard Robots
(12)Wafer storage positions
- MAXIPEC-3000 Air conditioning and filtration unit specifically designed for Falcon system providing class 10 environment
2001 Vintage

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