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Solitec 820 CB Photoresist Coat & Bake System

Asset #: 20117

Make: Solitec

Model: 820 CB

Wafer Sizes: 2, 3, 4, 5, 6 inch

Last Confirm Date: April 18, 2017

Solitec 820 CB Photoresist Coat & Bake System, 2" to 6"
- Automatic Two-station
- Resist Uniformity: 75 angstroms, 3 sigma
- Microprocessor Controlled (10 program capacity)
- Fast Hot Plate Bake: +/- 1.5ºC uniformity
- Speed Range: 200-8,000 rpm (solid state servo control)
- Acceleration Range: programmable from 0-40 krpm/s
- Hot Plate: up to 300ºC vacuum assisted enclosed bake
- Beltless Elevators
- Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi
- Vacuum Requirement: up to 4 connections, 1/4" OD
1988 Vintage

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